The number of particles in photoresist needs to be controlled. The number of particles in the photoresist solution directly determines the processing quality of the pattern and the yield of subsequent devices. The liquid particle sizer is a basic equipment for electronic material development, used as a liquid particle counter to maintain high cleanliness during the manufacturing of semiconductors and display panels. Can detect particles with a minimum size of 0.07um in products such as photoresist and SOG. Suitable for photoresist material development and incoming material inspection.

KS-41AMain technical parameters
Testing method: Off-line
Minimum particle size measured: 0.15um
Particle size range: 0.15um-0.5um
Factory set channel: 0.15/0.2/0.3/0.5um
Can be expanded to 10 channels on its own
Liquid flow rate: 10mL / min
Light source: Laser diode (wavelength 830nm, output power: 200mW)
Testeable particle concentration: 1200 particles/mL (error value within 5% for 0.15um)